Share

Rapid Thermal Processing and beyond: Applications in Semiconductor Processing

2008-03-24 Technology & Engineering
Download Rapid Thermal Processing and beyond: Applications in Semiconductor Processing PDF Online Free

Author :
Release : 2008-03-24
Genre : Technology & Engineering
Kind : eBook
Book Rating : 733/5 ( reviews)

GET EBOOK


Book Synopsis Rapid Thermal Processing and beyond: Applications in Semiconductor Processing by : Wielfried Lerch

Download or read book Rapid Thermal Processing and beyond: Applications in Semiconductor Processing written by Wielfried Lerch. This book was released on 2008-03-24. Available in PDF, EPUB and Kindle. Book excerpt: Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.

Rapid Thermal Processing and Beyond

2008 Materials
Download Rapid Thermal Processing and Beyond PDF Online Free

Author :
Release : 2008
Genre : Materials
Kind : eBook
Book Rating : 913/5 ( reviews)

GET EBOOK


Book Synopsis Rapid Thermal Processing and Beyond by : Wilfried Lerch

Download or read book Rapid Thermal Processing and Beyond written by Wilfried Lerch. This book was released on 2008. Available in PDF, EPUB and Kindle. Book excerpt: Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.

Rapid Thermal Processing

2012-12-02 Technology & Engineering
Download Rapid Thermal Processing PDF Online Free

Author :
Release : 2012-12-02
Genre : Technology & Engineering
Kind : eBook
Book Rating : 809/5 ( reviews)

GET EBOOK


Book Synopsis Rapid Thermal Processing by : Richard B. Fair

Download or read book Rapid Thermal Processing written by Richard B. Fair. This book was released on 2012-12-02. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Advances in Rapid Thermal Processing

1999 Technology & Engineering
Download Advances in Rapid Thermal Processing PDF Online Free

Author :
Release : 1999
Genre : Technology & Engineering
Kind : eBook
Book Rating : 327/5 ( reviews)

GET EBOOK


Book Synopsis Advances in Rapid Thermal Processing by : Fred Roozeboom

Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom. This book was released on 1999. Available in PDF, EPUB and Kindle. Book excerpt:

Manufacturing Issues in Rapid Thermal Processing

1999
Download Manufacturing Issues in Rapid Thermal Processing PDF Online Free

Author :
Release : 1999
Genre :
Kind : eBook
Book Rating : /5 ( reviews)

GET EBOOK


Book Synopsis Manufacturing Issues in Rapid Thermal Processing by : N. M. Ravindra

Download or read book Manufacturing Issues in Rapid Thermal Processing written by N. M. Ravindra. This book was released on 1999. Available in PDF, EPUB and Kindle. Book excerpt:

You may also like...