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Rapid Thermal Processing

2012-12-02 Technology & Engineering
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Release : 2012-12-02
Genre : Technology & Engineering
Kind : eBook
Book Rating : 809/5 ( reviews)

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Book Synopsis Rapid Thermal Processing by : Richard B. Fair

Download or read book Rapid Thermal Processing written by Richard B. Fair. This book was released on 2012-12-02. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Rapid Thermal Processing and beyond: Applications in Semiconductor Processing

2008-03-24 Technology & Engineering
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Release : 2008-03-24
Genre : Technology & Engineering
Kind : eBook
Book Rating : 733/5 ( reviews)

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Book Synopsis Rapid Thermal Processing and beyond: Applications in Semiconductor Processing by : Wielfried Lerch

Download or read book Rapid Thermal Processing and beyond: Applications in Semiconductor Processing written by Wielfried Lerch. This book was released on 2008-03-24. Available in PDF, EPUB and Kindle. Book excerpt: Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.

Advances in Rapid Thermal Processing

1999 Technology & Engineering
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Release : 1999
Genre : Technology & Engineering
Kind : eBook
Book Rating : 327/5 ( reviews)

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Book Synopsis Advances in Rapid Thermal Processing by : Fred Roozeboom

Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom. This book was released on 1999. Available in PDF, EPUB and Kindle. Book excerpt:

Advances in Rapid Thermal and Integrated Processing

2013-03-09 Science
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Release : 2013-03-09
Genre : Science
Kind : eBook
Book Rating : 116/5 ( reviews)

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Book Synopsis Advances in Rapid Thermal and Integrated Processing by : F. Roozeboom

Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom. This book was released on 2013-03-09. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.

Rapid Thermal Processing of Semiconductors

2013-11-22 Technology & Engineering
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Release : 2013-11-22
Genre : Technology & Engineering
Kind : eBook
Book Rating : 043/5 ( reviews)

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Book Synopsis Rapid Thermal Processing of Semiconductors by : Victor E. Borisenko

Download or read book Rapid Thermal Processing of Semiconductors written by Victor E. Borisenko. This book was released on 2013-11-22. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

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