Author : Victor E. Borisenko
Release : 2013-11-22
Genre : Technology & Engineering
Kind : eBook
Book Rating : 043/5 ( reviews)
Book Synopsis Rapid Thermal Processing of Semiconductors by : Victor E. Borisenko
Download or read book Rapid Thermal Processing of Semiconductors written by Victor E. Borisenko. This book was released on 2013-11-22. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.