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Rapid Thermal and Integrated Processing V: Volume 429

1996-10-14 Technology & Engineering
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Release : 1996-10-14
Genre : Technology & Engineering
Kind : eBook
Book Rating : /5 ( reviews)

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Book Synopsis Rapid Thermal and Integrated Processing V: Volume 429 by : J. C. Gelpey

Download or read book Rapid Thermal and Integrated Processing V: Volume 429 written by J. C. Gelpey. This book was released on 1996-10-14. Available in PDF, EPUB and Kindle. Book excerpt: This book is the latest in a continuing series on rapid thermal processing and related topics. It embraces a diversity of research, development and manufacturing activities that require rapid thermal and integrated processing techniques which are recognized by their acronyms, such as rapid thermal annealing (RTA), rapid thermal processing (RTP), rapid thermal chemical vapor deposition (RTCVP), rapid thermal oxidation (RTO), and others. This fifth anniversary volume reports notable advances in the use of rapid thermal techniques in processing science and technology, and for process control in industrial fabrication facilities. It is organized around progress obtained through: evaluation methodology; equipment and process modelling; temperature control; defects and diffusion associated with annealing; metallizations such as silicidation; novel processing of sol-gel and magnetic films; dielectric growth and deposition; and silicon or silicon-germanium film deposition.

Advances in Rapid Thermal Processing

1999 Technology & Engineering
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Release : 1999
Genre : Technology & Engineering
Kind : eBook
Book Rating : 327/5 ( reviews)

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Book Synopsis Advances in Rapid Thermal Processing by : Fred Roozeboom

Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom. This book was released on 1999. Available in PDF, EPUB and Kindle. Book excerpt:

Microwave Processing of Materials V: Volume 430

1996-10-28 Technology & Engineering
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Release : 1996-10-28
Genre : Technology & Engineering
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Book Synopsis Microwave Processing of Materials V: Volume 430 by : Materials Research Society. Meeting

Download or read book Microwave Processing of Materials V: Volume 430 written by Materials Research Society. Meeting. This book was released on 1996-10-28. Available in PDF, EPUB and Kindle. Book excerpt: Based on an international gathering of scientists and engineers from 17 countries, this book, the fifth in a continuing series, assesses microwave processing of materials as an emerging technology. Significant advances in understanding and control of microwave energy and its use in the processing and testing of materials are outlined. Future research and development needs are also explored. Topics include: scale-up and commercialization; microwave nondestructive testing; microwave processing; microwave system design; dielectric properties measurements and analysis; modelling of microwave heating; microwave interactions and mechanisms; microwave processing using variable frequency sources; alternate microwave sources; remediation of hazardous waste; temperature modelling and measurements; microwave processing of polymers; and plasma processing.

ULSI Science and Technology/1997

1997 Computers
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Release : 1997
Genre : Computers
Kind : eBook
Book Rating : 306/5 ( reviews)

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Book Synopsis ULSI Science and Technology/1997 by : Hisham Z. Massoud

Download or read book ULSI Science and Technology/1997 written by Hisham Z. Massoud. This book was released on 1997. Available in PDF, EPUB and Kindle. Book excerpt:

Rapid Thermal and Integrated Processing III: Volume 342

1994-08-02 Technology & Engineering
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Release : 1994-08-02
Genre : Technology & Engineering
Kind : eBook
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Book Synopsis Rapid Thermal and Integrated Processing III: Volume 342 by : Jimmie J. Wortman

Download or read book Rapid Thermal and Integrated Processing III: Volume 342 written by Jimmie J. Wortman. This book was released on 1994-08-02. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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