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MEMS Mechanical Sensors

2004 Technology & Engineering
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Release : 2004
Genre : Technology & Engineering
Kind : eBook
Book Rating : 364/5 ( reviews)

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Book Synopsis MEMS Mechanical Sensors by : Stephen Beeby

Download or read book MEMS Mechanical Sensors written by Stephen Beeby. This book was released on 2004. Available in PDF, EPUB and Kindle. Book excerpt: Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

Smart Sensors and MEMS

2018-02-27 Technology & Engineering
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Release : 2018-02-27
Genre : Technology & Engineering
Kind : eBook
Book Rating : 562/5 ( reviews)

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Book Synopsis Smart Sensors and MEMS by : S Nihtianov

Download or read book Smart Sensors and MEMS written by S Nihtianov. This book was released on 2018-02-27. Available in PDF, EPUB and Kindle. Book excerpt: Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications

MEMS/NEMS Sensors

2019-11-20 Technology & Engineering
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Release : 2019-11-20
Genre : Technology & Engineering
Kind : eBook
Book Rating : 341/5 ( reviews)

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Book Synopsis MEMS/NEMS Sensors by : Goutam Koley

Download or read book MEMS/NEMS Sensors written by Goutam Koley. This book was released on 2019-11-20. Available in PDF, EPUB and Kindle. Book excerpt: Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.

MEMS Sensors

2018-07-18 Technology & Engineering
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Release : 2018-07-18
Genre : Technology & Engineering
Kind : eBook
Book Rating : 941/5 ( reviews)

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Book Synopsis MEMS Sensors by : Siva Yellampalli

Download or read book MEMS Sensors written by Siva Yellampalli. This book was released on 2018-07-18. Available in PDF, EPUB and Kindle. Book excerpt: MEMS by becoming a part of various applications ranging from smartphones to automobiles has become an integral part of our everyday life. MEMS is building synergy between previously unrelated fields such as biology, microelectronics and communications, to improve the quality of human life. The sensors in MEMS gather information from the surrounding, which is then processed by the electronics for decision-making to control the environment. MEMS offers opportunities to miniaturize devices, integrate them with electronics and realize cost savings through batch fabrication. MEMS technology has enhanced many important applications in domains such as consumer electronics, biotechnology and communication and it holds great promise for continued contributions in the future. This book focuses on understanding the design, development and various applications of MEMS sensors.

MEMS and Nanotechnology for Gas Sensors

2017-12-19 Technology & Engineering
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Release : 2017-12-19
Genre : Technology & Engineering
Kind : eBook
Book Rating : 136/5 ( reviews)

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Book Synopsis MEMS and Nanotechnology for Gas Sensors by : Sunipa Roy

Download or read book MEMS and Nanotechnology for Gas Sensors written by Sunipa Roy. This book was released on 2017-12-19. Available in PDF, EPUB and Kindle. Book excerpt: How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.

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