MEMS Mechanical Sensors

2004 Technology & Engineering

Author : Stephen Beeby
Release : 2004
Genre : Technology & Engineering
Kind : eBook
Book Rating : 364/5 ( reviews)

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Book Synopsis MEMS Mechanical Sensors by : Stephen Beeby

Download or read book MEMS Mechanical Sensors written by Stephen Beeby. This book was released on 2004. Available in PDF, EPUB and Kindle. Book excerpt: Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

MEMS Mechanical Sensors

2004 Technology & Engineering

Author : Stephen Beeby
Release : 2004
Genre : Technology & Engineering
Kind : eBook
Book Rating : 732/5 ( reviews)

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Book Synopsis MEMS Mechanical Sensors by : Stephen Beeby

Download or read book MEMS Mechanical Sensors written by Stephen Beeby. This book was released on 2004. Available in PDF, EPUB and Kindle. Book excerpt: Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.

Mechanical Microsensors

2012-12-06 Technology & Engineering

Author : M. Elwenspoek
Release : 2012-12-06
Genre : Technology & Engineering
Kind : eBook
Book Rating : 211/5 ( reviews)

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Book Synopsis Mechanical Microsensors by : M. Elwenspoek

Download or read book Mechanical Microsensors written by M. Elwenspoek. This book was released on 2012-12-06. Available in PDF, EPUB and Kindle. Book excerpt: This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).

Smart Sensors and MEMS

2018-02-27 Technology & Engineering

Author : S Nihtianov
Release : 2018-02-27
Genre : Technology & Engineering
Kind : eBook
Book Rating : 562/5 ( reviews)

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Book Synopsis Smart Sensors and MEMS by : S Nihtianov

Download or read book Smart Sensors and MEMS written by S Nihtianov. This book was released on 2018-02-27. Available in PDF, EPUB and Kindle. Book excerpt: Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications

MEMS/NEMS Sensors

2019-11-20 Technology & Engineering

Author : Goutam Koley
Release : 2019-11-20
Genre : Technology & Engineering
Kind : eBook
Book Rating : 341/5 ( reviews)

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Book Synopsis MEMS/NEMS Sensors by : Goutam Koley

Download or read book MEMS/NEMS Sensors written by Goutam Koley. This book was released on 2019-11-20. Available in PDF, EPUB and Kindle. Book excerpt: Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.

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