1# Library to Find Best eBook for Read
Author : Siraj Ahmed Sayeed
Release : 1994
Genre : Microelectronics
Kind : eBook
Book Rating : /5 ( reviews)
Book Synopsis Design of Microelectromechanical Structures Using Surface Micromachining Techniques by : Siraj Ahmed Sayeed
Download or read book Design of Microelectromechanical Structures Using Surface Micromachining Techniques written by Siraj Ahmed Sayeed. This book was released on 1994. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Robert W. Johnstone
Release : 2004-06-03
Genre : Technology & Engineering
Kind : eBook
Book Rating : 203/5 ( reviews)
Book Synopsis An Introduction to Surface-Micromachining by : Robert W. Johnstone
Download or read book An Introduction to Surface-Micromachining written by Robert W. Johnstone. This book was released on 2004-06-03. Available in PDF, EPUB and Kindle. Book excerpt: An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
Author : Vijay K. Varadan
Release : 2006-11-02
Genre : Technology & Engineering
Kind : eBook
Book Rating : 625/5 ( reviews)
Book Synopsis Smart Material Systems and MEMS by : Vijay K. Varadan
Download or read book Smart Material Systems and MEMS written by Vijay K. Varadan. This book was released on 2006-11-02. Available in PDF, EPUB and Kindle. Book excerpt: Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.
Author : National Research Council
Release : 1998-01-01
Genre : Technology & Engineering
Kind : eBook
Book Rating : 801/5 ( reviews)
Book Synopsis Microelectromechanical Systems by : National Research Council
Download or read book Microelectromechanical Systems written by National Research Council. This book was released on 1998-01-01. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Author : Masayoshi Esashi
Release : 2021-03-16
Genre : Technology & Engineering
Kind : eBook
Book Rating : 255/5 ( reviews)
Book Synopsis 3D and Circuit Integration of MEMS by : Masayoshi Esashi
Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi. This book was released on 2021-03-16. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
