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An Introduction to Surface-Micromachining

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Release : 2004-06-03
Genre : Technology & Engineering
Kind : eBook
Book Rating : 203/5 ( reviews)

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Book Synopsis An Introduction to Surface-Micromachining by : Robert W. Johnstone

Download or read book An Introduction to Surface-Micromachining written by Robert W. Johnstone. This book was released on 2004-06-03. Available in PDF, EPUB and Kindle. Book excerpt: An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Introduction to Microfabrication

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Release : 2005-01-28
Genre : Technology & Engineering
Kind : eBook
Book Rating : 563/5 ( reviews)

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Book Synopsis Introduction to Microfabrication by : Sami Franssila

Download or read book Introduction to Microfabrication written by Sami Franssila. This book was released on 2005-01-28. Available in PDF, EPUB and Kindle. Book excerpt: Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.

Silicon Micromachining

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Release : 2004-08-19
Genre : Art
Kind : eBook
Book Rating : 674/5 ( reviews)

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Book Synopsis Silicon Micromachining by : Miko Elwenspoek

Download or read book Silicon Micromachining written by Miko Elwenspoek. This book was released on 2004-08-19. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.

An Introduction to Microelectromechanical Systems Engineering

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Author :
Release : 2004
Genre : Technology & Engineering
Kind : eBook
Book Rating : 915/5 ( reviews)

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Book Synopsis An Introduction to Microelectromechanical Systems Engineering by : Nadim Maluf

Download or read book An Introduction to Microelectromechanical Systems Engineering written by Nadim Maluf. This book was released on 2004. Available in PDF, EPUB and Kindle. Book excerpt: Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

Design of Microelectromechanical Structures Using Surface Micromachining Techniques

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Release : 1994
Genre : Microelectronics
Kind : eBook
Book Rating : /5 ( reviews)

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Book Synopsis Design of Microelectromechanical Structures Using Surface Micromachining Techniques by : Siraj Ahmed Sayeed

Download or read book Design of Microelectromechanical Structures Using Surface Micromachining Techniques written by Siraj Ahmed Sayeed. This book was released on 1994. Available in PDF, EPUB and Kindle. Book excerpt:

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