Author : Cor L. Claeys
Release : 2007
Genre : Integrated circuits
Kind : eBook
Book Rating : 728/5 ( reviews)
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Book Synopsis ULSI Process Integration 5 by : Cor L. Claeys
Download or read book ULSI Process Integration 5 written by Cor L. Claeys. This book was released on 2007. Available in PDF, EPUB and Kindle. Book excerpt: The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.