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Synthesis and Characterization of Core/shell Silica Nanoparticles for Chemical Mechanical Planarization of Low-k Dielectric and Copper Wafers

2010
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Release : 2010
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Book Synopsis Synthesis and Characterization of Core/shell Silica Nanoparticles for Chemical Mechanical Planarization of Low-k Dielectric and Copper Wafers by : Kannan Balasundaram

Download or read book Synthesis and Characterization of Core/shell Silica Nanoparticles for Chemical Mechanical Planarization of Low-k Dielectric and Copper Wafers written by Kannan Balasundaram. This book was released on 2010. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: Monodispersed core/shell silica particles with a hard core and microporous shell have been synthesized by surfactant template method. Ca. 75nm silica particles were used as core and Cetyltrimethylammonium bromide (C16TAB) as template for generating microporous shell. Concentration of the surfactant was varied and the growth of porous shell analyzed using high-resolution transmission electron microscopy and nitrogen adsorption. TGA and FTIR were used to confirm the surfactant removal after heat treatment. The synthesized particles were monodispersed and had a hard core and highly microporous shell with pore size in the range of 1.3-2.2nm and total pore volume in the range of 0.57-0.77cm3/g. The Chemical mechanical Planarization (CMP) performance of core/shell silica particles were analyzed and compared with that of core silica particles. Polishing was done on copper wafers and low-k dielectric material such as black diamond. The core/shell silica particles produced higher removal rates and better surface finish for both the wafers. Spectral reflectance technique and atomic force microscopy (AFM) were used as analyzing tool.

Multifunctional Core-shell Silica Particles

2005
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Release : 2005
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Book Synopsis Multifunctional Core-shell Silica Particles by : Hooisweng Ow

Download or read book Multifunctional Core-shell Silica Particles written by Hooisweng Ow. This book was released on 2005. Available in PDF, EPUB and Kindle. Book excerpt:

Synthesis and Characterization of Silica Nanoparticles and Magnetite/silica/titania Core Shell Nanocomposites

2013 Dissertations, Academic
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Release : 2013
Genre : Dissertations, Academic
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Book Synopsis Synthesis and Characterization of Silica Nanoparticles and Magnetite/silica/titania Core Shell Nanocomposites by :

Download or read book Synthesis and Characterization of Silica Nanoparticles and Magnetite/silica/titania Core Shell Nanocomposites written by . This book was released on 2013. Available in PDF, EPUB and Kindle. Book excerpt: The aims of this study were to synthesize and characterize silica based inorganic nanocomposite materials. The core shell nanocomposites prepared from magnetite, silica and titania was developed. Silica nanoparticles of different mean sizes (60 to 300nm) were successfully prepared by varying experimental conditions, i.e. the effect of [H2O]/[TEOS] ratios, ammonia concentration, dialysis, amount of polyethylene glycol (PEO) and polyvinyl pyrrolidone (PVP).

Gas-phase Synthesis of Silica Nanoparticles: Reaction Kinetics, Synthesis and Characterization

2014-04-25
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Release : 2014-04-25
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Book Synopsis Gas-phase Synthesis of Silica Nanoparticles: Reaction Kinetics, Synthesis and Characterization by : Ali Abdali

Download or read book Gas-phase Synthesis of Silica Nanoparticles: Reaction Kinetics, Synthesis and Characterization written by Ali Abdali. This book was released on 2014-04-25. Available in PDF, EPUB and Kindle. Book excerpt:

Silica-based Nanoparticles

2014
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Release : 2014
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Book Synopsis Silica-based Nanoparticles by : Yao Sun

Download or read book Silica-based Nanoparticles written by Yao Sun. This book was released on 2014. Available in PDF, EPUB and Kindle. Book excerpt: Mesoporous silica nanoparticles (MSNs) combine the benefits of nanomaterials and mesoporous silica materials. This class of materials is characterized by ordered pore structures, controllable pore size, and large surface area. Significant research efforts have been devoted to achieve the control over particle size, morphology, pore size, and mesostructure. In this dissertation, I will describe the synthetic approaches, characterization, and structural control of three types of silica-based nanoparticles (NPs). Firstly, the water-based synthesis of ultrasmall (sub-10 nm) PEGylated gold-silica core-shell NPs is described. These core-shell NPs are composed of an ultrasmall gold core, a thin silica shell, and a polyethylene glycol (PEG) outer layer. The core-shell NPs show long-term stability for nearly a year in both water and PBS buffer solution. The NP suspensions further exhibit good contrast in a microscale computed tomography (micro-CT) scanner. Secondly a type of stimuli-responsive aminated MSNs with shapeshifting behavior is introduced. The shape change can be achieved when MSNs are exposed to water vapor in solid-state form for 24 hours, or when MSN suspensions in ethanol are evaporated at high humidity, or when MSNs are vacuum-dried from water-rich solvents. Under these circumstances, the cross-sectional shape of animated MSN's can change from hexagonal to six-angle-star, accompanied by the loss of mesostructural long-range hexagonal order, a decrease in surface area and mesopore volume, an increase in micropore volume, and further condensation of the silica matrix. Finally, the synthesis and detailed characterization of a class of quasicrystalline MSNs is discussed. These MSNs exhibit dodecagonal (12-fold) symmetry with particle sizes below 100 nm.

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