Spectroscopic Ellipsometry

2007-09-27 Technology & Engineering

Author : Hiroyuki Fujiwara
Release : 2007-09-27
Genre : Technology & Engineering
Kind : eBook
Book Rating : 186/5 ( reviews)

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Book Synopsis Spectroscopic Ellipsometry by : Hiroyuki Fujiwara

Download or read book Spectroscopic Ellipsometry written by Hiroyuki Fujiwara. This book was released on 2007-09-27. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Spectroscopic Ellipsometry

2015-12-16 Technology & Engineering

Author : Harland G. Tompkins
Release : 2015-12-16
Genre : Technology & Engineering
Kind : eBook
Book Rating : 281/5 ( reviews)

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Book Synopsis Spectroscopic Ellipsometry by : Harland G. Tompkins

Download or read book Spectroscopic Ellipsometry written by Harland G. Tompkins. This book was released on 2015-12-16. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.

Spectroscopic Ellipsometry for Photovoltaics

2019-01-10 Science

Author : Hiroyuki Fujiwara
Release : 2019-01-10
Genre : Science
Kind : eBook
Book Rating : 770/5 ( reviews)

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Book Synopsis Spectroscopic Ellipsometry for Photovoltaics by : Hiroyuki Fujiwara

Download or read book Spectroscopic Ellipsometry for Photovoltaics written by Hiroyuki Fujiwara. This book was released on 2019-01-10. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a basic understanding of spectroscopic ellipsometry, with a focus on characterization methods of a broad range of solar cell materials/devices, from traditional solar cell materials (Si, CuInGaSe2, and CdTe) to more advanced emerging materials (Cu2ZnSnSe4, organics, and hybrid perovskites), fulfilling a critical need in the photovoltaic community. The book describes optical constants of a variety of semiconductor light absorbers, transparent conductive oxides and metals that are vital for the interpretation of solar cell characteristics and device simulations. It is divided into four parts: fundamental principles of ellipsometry; characterization of solar cell materials/structures; ellipsometry applications including optical simulations of solar cell devices and online monitoring of film processing; and the optical constants of solar cell component layers.

Spectroscopic Ellipsometry for Photovoltaics

2019-01-10 Science

Author : Hiroyuki Fujiwara
Release : 2019-01-10
Genre : Science
Kind : eBook
Book Rating : 386/5 ( reviews)

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Book Synopsis Spectroscopic Ellipsometry for Photovoltaics by : Hiroyuki Fujiwara

Download or read book Spectroscopic Ellipsometry for Photovoltaics written by Hiroyuki Fujiwara. This book was released on 2019-01-10. Available in PDF, EPUB and Kindle. Book excerpt: Spectroscopic ellipsometry has been applied to a wide variety of material and device characterizations in solar cell research fields. In particular, device performance analyses using exact optical constants of component layers and direct analyses of complex solar cell structures are unique features of advanced ellipsometry methods. This second volume of Spectroscopic Ellipsometry for Photovoltaics presents various applications of the ellipsometry technique for device analyses, including optical/recombination loss analyses, real-time control and on-line monitoring of solar cell structures, and large-area structural mapping. Furthermore, this book describes the optical constants of 148 solar cell component layers, covering a broad range of materials from semiconductor light absorbers (inorganic, organic and hybrid perovskite semiconductors) to transparent conductive oxides and metals. The tabulated and completely parameterized optical constants described in this book are the most current resource that is vital for device simulations and solar cell structural analyses.

Spectroscopic Ellipsometry and Reflectometry

1999-03-18 Science

Author : Harland G. Tompkins
Release : 1999-03-18
Genre : Science
Kind : eBook
Book Rating : 729/5 ( reviews)

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Book Synopsis Spectroscopic Ellipsometry and Reflectometry by : Harland G. Tompkins

Download or read book Spectroscopic Ellipsometry and Reflectometry written by Harland G. Tompkins. This book was released on 1999-03-18. Available in PDF, EPUB and Kindle. Book excerpt: While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

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