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Plasma Processes and Plasma Kinetics

2008-09-26 Science
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Release : 2008-09-26
Genre : Science
Kind : eBook
Book Rating : 089/5 ( reviews)

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Book Synopsis Plasma Processes and Plasma Kinetics by : Boris M. Smirnov

Download or read book Plasma Processes and Plasma Kinetics written by Boris M. Smirnov. This book was released on 2008-09-26. Available in PDF, EPUB and Kindle. Book excerpt: This problems supplement to plasma physics textbooks covers plasma theory for both science and technology. Written by a renowned plasma scientist, experienced book author and skilled teacher, it treats all aspects of plasma theory in no fewer than 520 very detailed worked-out problems. With this systematic collection the reader will gain a sound understanding of plasma physics in all fields, from fusion and astrophysics to surface treatment. The book also includes the transport of particles as well as radiation in plasmas, and while designed for graduate students and young researchers, it can equally serve as a reference.

Plasma Kinetics in Atmospheric Gases

2013-03-09 Science
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Release : 2013-03-09
Genre : Science
Kind : eBook
Book Rating : 588/5 ( reviews)

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Book Synopsis Plasma Kinetics in Atmospheric Gases by : M. Capitelli

Download or read book Plasma Kinetics in Atmospheric Gases written by M. Capitelli. This book was released on 2013-03-09. Available in PDF, EPUB and Kindle. Book excerpt: Emphasis is placed on the analysis of translational, rotational, vibrational and electronically excited state kinetics, coupled to the electron Boltzmann equation.

Lecture Notes on Principles of Plasma Processing

2012-12-06 Science
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Release : 2012-12-06
Genre : Science
Kind : eBook
Book Rating : 814/5 ( reviews)

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Book Synopsis Lecture Notes on Principles of Plasma Processing by : Francis F. Chen

Download or read book Lecture Notes on Principles of Plasma Processing written by Francis F. Chen. This book was released on 2012-12-06. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

Plasma Processing of Materials

1991-02-01 Technology & Engineering
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Release : 1991-02-01
Genre : Technology & Engineering
Kind : eBook
Book Rating : 975/5 ( reviews)

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Book Synopsis Plasma Processing of Materials by : National Research Council

Download or read book Plasma Processing of Materials written by National Research Council. This book was released on 1991-02-01. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.

Plasma Physics and Engineering

2004-04-15 Science
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Release : 2004-04-15
Genre : Science
Kind : eBook
Book Rating : 483/5 ( reviews)

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Book Synopsis Plasma Physics and Engineering by : Alexander Fridman

Download or read book Plasma Physics and Engineering written by Alexander Fridman. This book was released on 2004-04-15. Available in PDF, EPUB and Kindle. Book excerpt: Plasma engineering is a rapidly expanding area of science and technology with increasing numbers of engineers using plasma processes over a wide range of applications. An essential tool for understanding this dynamic field, Plasma Physics and Engineering provides a clear, fundamental introduction to virtually all aspects of modern plasma science and technology, including plasma chemistry and engineering, combustion, chemical physics, lasers, electronics, methods of material treatment, fuel conversion, and environmental control. The book contains an extensive database on plasma kinetics and thermodynamics, many helpful numerical formulas for practical calculations, and an array of problems and concept questions.

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