Author : Alfred Kwok-Kit Wong
Release : 2005
Genre : Technology & Engineering
Kind : eBook
Book Rating : 292/5 ( reviews)

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Book Synopsis Optical Imaging in Projection Microlithography by : Alfred Kwok-Kit Wong

Download or read book Optical Imaging in Projection Microlithography written by Alfred Kwok-Kit Wong. This book was released on 2005. Available in PDF, EPUB and Kindle. Book excerpt: Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system-level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.