Author : Raja Nassar
Release : 2013-03-09
Genre : Technology & Engineering
Kind : eBook
Book Rating : 928/5 ( reviews)
Book Synopsis Modelling of Microfabrication Systems by : Raja Nassar
Download or read book Modelling of Microfabrication Systems written by Raja Nassar. This book was released on 2013-03-09. Available in PDF, EPUB and Kindle. Book excerpt: This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.