1# Library to Find Best eBook for Read
Author :
Release : 2004
Genre : Dielectric films
Kind : eBook
Book Rating : /5 ( reviews)
Book Synopsis Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics by :
Download or read book Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics written by . This book was released on 2004. Available in PDF, EPUB and Kindle. Book excerpt:
Author : R. J. Carter
Release : 2004-09
Genre : Technology & Engineering
Kind : eBook
Book Rating : /5 ( reviews)
Book Synopsis Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics - 2004 by : R. J. Carter
Download or read book Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics - 2004 written by R. J. Carter. This book was released on 2004-09. Available in PDF, EPUB and Kindle. Book excerpt: The scaling of device dimensions with a simultaneous increase in functional density has imposed tremendous challenges for materials, technology, integration and reliability of interconnects. To meet requirements of the ITRS roadmap, new materials are being introduced at a faster pace in all functions of multilevel interconnects. The issues addressed in this book cannot be dispelled as simply selecting a low-k material and integrating it into a copper damascene process. The intricacies of the back end for sub-100nm technology include novel processing of low-k materials, employing pore-sealing techniques and capping layers, introducing advanced dielectric and diffusion barriers, and developing novel integration schemes. This is in addition to concerns of performance, yield, and reliability appropriate to nanoscaled interconnects. Although many challenges continue to impede progress along the ITRS roadmap, the contributions in this book confront them head-on. It provides a scientific understanding of the issues and stimulate new approaches to advanced multilevel interconnects.
Author : G. S. Oehrlein
Release : 2014-06-05
Genre : Technology & Engineering
Kind : eBook
Book Rating : 153/5 ( reviews)
Book Synopsis Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics: by : G. S. Oehrlein
Download or read book Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics: written by G. S. Oehrlein. This book was released on 2014-06-05. Available in PDF, EPUB and Kindle. Book excerpt: This book highlights important achievements and challenges in advanced interconnects and low-k dielectrics as employed in the microelectronics industry. The replacement of Al alloys with Cu along with the introduction of new barrier materials to protect Cu from chemical attack, and the utilization of new dielectric materials with a lower relative dielectric constant k than SiO2 in multilevel metallization structures of increasing complexity, are the major themes of evolution in this field. Invited reviews illustrate the significant progress that has been achieved as well as the challenges that remain. Contributed papers presented by researchers from different countries demonstrate progress on current topics using a truly multidisciplinary approach.
Author : Materials Research Society. Meeting
Release : 2003
Genre : Dielectric films
Kind : eBook
Book Rating : /5 ( reviews)
Book Synopsis Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, 2003 by : Materials Research Society. Meeting
Download or read book Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, 2003 written by Materials Research Society. Meeting. This book was released on 2003. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Release : 2001
Genre : Dielectric films
Kind : eBook
Book Rating : /5 ( reviews)
Book Synopsis Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics by :
Download or read book Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics written by . This book was released on 2001. Available in PDF, EPUB and Kindle. Book excerpt:
