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Low Dielectric Constant Materials for IC Applications

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Release : 2012-12-06
Genre : Technology & Engineering
Kind : eBook
Book Rating : 085/5 ( reviews)

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Book Synopsis Low Dielectric Constant Materials for IC Applications by : Paul S. Ho

Download or read book Low Dielectric Constant Materials for IC Applications written by Paul S. Ho. This book was released on 2012-12-06. Available in PDF, EPUB and Kindle. Book excerpt: Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for

Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set

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Release : 1999-09-07
Genre : Science
Kind : eBook
Book Rating : 531/5 ( reviews)

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Book Synopsis Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set by : Hari Singh Nalwa

Download or read book Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set written by Hari Singh Nalwa. This book was released on 1999-09-07. Available in PDF, EPUB and Kindle. Book excerpt: Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made to develop new low as well as high dielectric constant materials for applications in electronics industries. Besides achieving either low or high dielectric constants, other materials' properties such as good processability, high mechanical strength, high thermal and environmental stability, low thermal expansion, low current leakage, low moisture absorption, corrosion resistant, etc., are of equal importance. Many chemical and physical strategies have been employed to get desired dielectric materials with high performance. This is a rapidly growing field of science--both in novel materials and their applications to future packing technologies. The experimental data on inorganic and organic materials having low or high dielectric constant remail scattered in the literature. It is timely, therfore, to consolidate the current knowledge on low and high dielectric constant materials into a sigle reference source. Handbook of Low and High Dielectric Constant Materials and Their Applications is aimed at bringing together under a sigle cover (in two volumes) all low and high dielectric constant materials currently studied in academic and industrial research covering all spects of inorgani an organic materials from their synthetic chemistry, processing techniques, physics, structure-property relationship to applications in IC devices. This book will summarize the current status of the field covering important scientific developments made over the past decade with contributions from internationally recognized experts from all over the world. Fully cross-referenced, this book has clear, precise, and wide appeal as an essential reference source for all those interested in low and high dielectric constant material.

Low-dielectric Constant Materials-- Synthesis and Applications in Microelectronics

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Author :
Release : 1995
Genre : Electric insulators and insulation
Kind : eBook
Book Rating : /5 ( reviews)

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Book Synopsis Low-dielectric Constant Materials-- Synthesis and Applications in Microelectronics by : Toh-Ming Lu

Download or read book Low-dielectric Constant Materials-- Synthesis and Applications in Microelectronics written by Toh-Ming Lu. This book was released on 1995. Available in PDF, EPUB and Kindle. Book excerpt:

Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications

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Author :
Release : 2006
Genre : Dielectric films
Kind : eBook
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Book Synopsis Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications by : Ramakrishna Vedula

Download or read book Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications written by Ramakrishna Vedula. This book was released on 2006. Available in PDF, EPUB and Kindle. Book excerpt:

High Dielectric Constant Materials

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Author :
Release : 2005
Genre : Science
Kind : eBook
Book Rating : 818/5 ( reviews)

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Book Synopsis High Dielectric Constant Materials by : Howard Huff

Download or read book High Dielectric Constant Materials written by Howard Huff. This book was released on 2005. Available in PDF, EPUB and Kindle. Book excerpt: Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.

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