Share

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

2002-02-01 Science
Download Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon PDF Online Free

Author :
Release : 2002-02-01
Genre : Science
Kind : eBook
Book Rating : 686/5 ( reviews)

GET EBOOK


Book Synopsis Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon by : Krishna Seshan

Download or read book Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon written by Krishna Seshan. This book was released on 2002-02-01. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

Handbook of Thin-film Deposition Processes and Techniques

2002 Chemical vapor deposition
Download Handbook of Thin-film Deposition Processes and Techniques PDF Online Free

Author :
Release : 2002
Genre : Chemical vapor deposition
Kind : eBook
Book Rating : 195/5 ( reviews)

GET EBOOK


Book Synopsis Handbook of Thin-film Deposition Processes and Techniques by : Krishna Seshan

Download or read book Handbook of Thin-film Deposition Processes and Techniques written by Krishna Seshan. This book was released on 2002. Available in PDF, EPUB and Kindle. Book excerpt: The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

2002-02-01 Technology & Engineering
Download Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon PDF Online Free

Author :
Release : 2002-02-01
Genre : Technology & Engineering
Kind : eBook
Book Rating : 428/5 ( reviews)

GET EBOOK


Book Synopsis Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon by : Krishna Seshan

Download or read book Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon written by Krishna Seshan. This book was released on 2002-02-01. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers PVD, laser and E-beam assisted deposition, MBE, and ion beam methods to bring together all of the physical vapor deposition techniques. The book also includes coverage of chemical mechanical polishing that helps attain the flatness that is required by modern lithography methods and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Handbook of Deposition Technologies for Films and Coatings

1994 Science
Download Handbook of Deposition Technologies for Films and Coatings PDF Online Free

Author :
Release : 1994
Genre : Science
Kind : eBook
Book Rating : 372/5 ( reviews)

GET EBOOK


Book Synopsis Handbook of Deposition Technologies for Films and Coatings by : Rointan Framroze Bunshah

Download or read book Handbook of Deposition Technologies for Films and Coatings written by Rointan Framroze Bunshah. This book was released on 1994. Available in PDF, EPUB and Kindle. Book excerpt: This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.

Handbook of Thin Film Deposition Processes and Techniques

2001-02-01 Technology & Engineering
Download Handbook of Thin Film Deposition Processes and Techniques PDF Online Free

Author :
Release : 2001-02-01
Genre : Technology & Engineering
Kind : eBook
Book Rating : 785/5 ( reviews)

GET EBOOK


Book Synopsis Handbook of Thin Film Deposition Processes and Techniques by : Krishna Seshan

Download or read book Handbook of Thin Film Deposition Processes and Techniques written by Krishna Seshan. This book was released on 2001-02-01. Available in PDF, EPUB and Kindle. Book excerpt: New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

You may also like...