Epitaxial Functional Oxide Integration on Germanium

2017

Author : Patrick Ponath
Release : 2017
Genre :
Kind : eBook
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Book Synopsis Epitaxial Functional Oxide Integration on Germanium by : Patrick Ponath

Download or read book Epitaxial Functional Oxide Integration on Germanium written by Patrick Ponath. This book was released on 2017. Available in PDF, EPUB and Kindle. Book excerpt: Germanium, with its higher hole and electron mobility is a potential candidate to replace silicon as a channel material in a field effect transistor in the future. The integration of high quality crystalline oxides on semiconductors still remains a challenge due to lattice defects, a lattice constant mismatch as well as a possible thermodynamic instability between the thin film and the substrate. In this work we report the integration of functional oxides on germanium, which exhibit a wide variety of useful physical properties such as ferromagnetism, superconductivity or ferroelectricity which are of high interest for future electronic devices as i.e. for the development of a ferroelectric field-effect transistor. The focus of this thesis lies on the study of the high-[kappa] and ferroelectric material barium titanate, grown on germanium (001) by using an oxide molecular beam epitaxy machine. Further characterization techniques as x-ray diffraction, x-ray reflectivity, x-ray photoelectron spectroscopy, atomic force microscopy and electrical measurements are used to study the properties of the oxide films and to obtain a deeper understanding of their interface qualities with the substrate. This research contributes significantly for the development of a ferroelectric field-effect transistor and oxide heterostructures on germanium in general.

Integration of Functional Oxides with Semiconductors

2014-02-20 Technology & Engineering

Author : Alexander A. Demkov
Release : 2014-02-20
Genre : Technology & Engineering
Kind : eBook
Book Rating : 20X/5 ( reviews)

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Book Synopsis Integration of Functional Oxides with Semiconductors by : Alexander A. Demkov

Download or read book Integration of Functional Oxides with Semiconductors written by Alexander A. Demkov. This book was released on 2014-02-20. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. Intended for a multidisciplined audience, Integration of Functional Oxides with Semiconductors describes processing techniques that enable atomic-level control of stoichiometry and structure and reviews characterization techniques for films, interfaces and device performance parameters. Fundamental challenges involved in joining covalent and ionic systems, chemical interactions at interfaces, multi-element materials that are sensitive to atomic-level compositional and structural changes are discussed in the context of the latest literature. Magnetic, ferroelectric and piezoelectric materials and the coupling between them will also be discussed. GaN, SiC, Si, GaAs and Ge semiconductors are covered within the context of optimizing next-generation device performance for monolithic device processing.

Epitaxy of Crystalline Oxides for Functional Materials Integration on Silicon

2010

Author : Gang Niu
Release : 2010
Genre :
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Book Synopsis Epitaxy of Crystalline Oxides for Functional Materials Integration on Silicon by : Gang Niu

Download or read book Epitaxy of Crystalline Oxides for Functional Materials Integration on Silicon written by Gang Niu. This book was released on 2010. Available in PDF, EPUB and Kindle. Book excerpt: Oxides form a class of material which covers almost all the spectra of functionalities : dielectricity, semiconductivity, metallicity superconductivity, non-linear optics, acoustics, piezoelectricity, ferroelectricity, ferromagnetism...In this thesis, crystalline oxides have beenintegrated on the workhorse of the semiconductor industry, the silicon, by Molecular Beam Epitaxy (MBE).The first great interest of the epitaxial growth of crystalline oxides on silicon consists in the application of "high-k" dielectric for future sub-22nm CMOS technology. Gadoliniumoxide was explored in detail as a promising candidate of the alternative of SiO2. The pseudomorphic epitaxial growth of Gd2O3 on Si (111) was realized by identifying the optimal growth conditions. The Gd2O3 films show good dielectric properties and particularly an EOTof 0.73nm with a leakage current consistent with the requirements of ITRS for the sub-22nmnodes. In addition, the dielectric behavior of Gd2O3 thin films was further improved by performing PDA treatments. The second research interest on crystalline oxide/Si platform results from its potential application for the "More than Moore" and "Heterogeneous integration" technologies. TheSrTiO3/Si (001) was intensively studied as a paradigm of the integration of oxides on semiconductors. The crystallinity, interface and surface qualities and relaxation process of the STO films on silicon grown at the optimal conditions were investigated and analyzed. Several optimized growth processes were carried out and compared. Finally a "substrate-like" STO thin film was obtained on the silicon substrate with good crystallinity and atomic flat surface. Based on the Gd2O3/Si and SrTiO3/Si templates, diverse functionalities were integrated on the silicon substrate, such as ferro-(piezo-)electricity (BaTiO3, PZT and PMN-PT),ferromagnetism (LSMO) and optoelectronics (Ge). These functional materials epitaxially grown on Si can be widely used for storage memories, lasers and solar cells, etc.

Epitaxial Growth of Nitrides on Germanium

2009-09 Technology & Engineering

Author : Ruben Lieten
Release : 2009-09
Genre : Technology & Engineering
Kind : eBook
Book Rating : 856/5 ( reviews)

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Book Synopsis Epitaxial Growth of Nitrides on Germanium by : Ruben Lieten

Download or read book Epitaxial Growth of Nitrides on Germanium written by Ruben Lieten. This book was released on 2009-09. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to the formation of epitaxial III-Nitrides and epitaxial Ge3N4 on germanium substrates--and solid phase epitaxy of germanium on silicon substrates--this work presents a simple but effective method for growing epitaxial III-Nitride layers on crystalline germanium surfaces. Beside epitaxial III-Nitride growth, a method is introduced to obtain epitaxial Ge3N4 on germanium. Finally a novel method to produce high-quality germanium layers on silicon is introduced, allowing interactions between germanium devices and silicon technology. This study provides researchers with a detailed look at the formation of crystalline nitrides on germanium, germanium on silicon, Schottky contacts on germanium, and electrochemical measurements.

Molecular Beam Epitaxy

2018-06-27 Science

Author : Mohamed Henini
Release : 2018-06-27
Genre : Science
Kind : eBook
Book Rating : 378/5 ( reviews)

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Book Synopsis Molecular Beam Epitaxy by : Mohamed Henini

Download or read book Molecular Beam Epitaxy written by Mohamed Henini. This book was released on 2018-06-27. Available in PDF, EPUB and Kindle. Book excerpt: Molecular Beam Epitaxy (MBE): From Research to Mass Production, Second Edition, provides a comprehensive overview of the latest MBE research and applications in epitaxial growth, along with a detailed discussion and 'how to' on processing molecular or atomic beams that occur on the surface of a heated crystalline substrate in a vacuum. The techniques addressed in the book can be deployed wherever precise thin-film devices with enhanced and unique properties for computing, optics or photonics are required. It includes new semiconductor materials, new device structures that are commercially available, and many that are at the advanced research stage. This second edition covers the advances made by MBE, both in research and in the mass production of electronic and optoelectronic devices. Enhancements include new chapters on MBE growth of 2D materials, Si-Ge materials, AIN and GaN materials, and hybrid ferromagnet and semiconductor structures. - Condenses the fundamental science of MBE into a modern reference, speeding up literature review - Discusses new materials, novel applications and new device structures, grounding current commercial applications with modern understanding in industry and research - Includes coverage of MBE as mass production epitaxial technology and how it enhances processing efficiency and throughput for the semiconductor industry and nanostructured semiconductor materials research community

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