Author : M. Meyyappan
Release : 1995
Genre : Computers
Kind : eBook
Book Rating : /5 ( reviews)
Book Synopsis Computational Modeling in Semiconductor Processing by : M. Meyyappan
Download or read book Computational Modeling in Semiconductor Processing written by M. Meyyappan. This book was released on 1995. Available in PDF, EPUB and Kindle. Book excerpt: This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation -- so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.