Author : J. W. Elam
Release : 2010-10
Genre : Science
Kind : eBook
Book Rating : 212/5 ( reviews)
Book Synopsis Atomic Layer Deposition Applications 6 by : J. W. Elam
Download or read book Atomic Layer Deposition Applications 6 written by J. W. Elam. This book was released on 2010-10. Available in PDF, EPUB and Kindle. Book excerpt: The continuously expanding realm of Atomic Layer Deposition (ALD) Applications is the focus of this reoccurring symposium. ALD can enable the precise deposition of ultra-thin, highly conformal coatings over complex 3D topographies with controlled thickness and composition. This issue of ECS Transactions contains peer reviewed papers presented at the symposium. A broad spectrum of ALD applications is featured, including novel nano-composites and nanostructures, dielectrics for state-of-the-art transistors and capacitors, optoelectronics, and a variety of other emerging applications.