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Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

2013-05-29 Science
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Release : 2013-05-29
Genre : Science
Kind : eBook
Book Rating : 853/5 ( reviews)

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Book Synopsis Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies by : Kenichi Takahata

Download or read book Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies written by Kenichi Takahata. This book was released on 2013-05-29. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.

Micro-Nano Electrochemical Systems and Fabrication Techniques Handbook

2015-01-27
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Release : 2015-01-27
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Kind : eBook
Book Rating : 273/5 ( reviews)

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Book Synopsis Micro-Nano Electrochemical Systems and Fabrication Techniques Handbook by : Eve Versuh

Download or read book Micro-Nano Electrochemical Systems and Fabrication Techniques Handbook written by Eve Versuh. This book was released on 2015-01-27. Available in PDF, EPUB and Kindle. Book excerpt: This book is a collection of researches by various experts who share their analysis of current trends and future implications of micro-nano electrochemical systems. MEMS technology is progressively influencing and improving our quality of life. Simultaneously, progress in nanotechnology and nanomaterials has accelerated the growth of NEMS. This book consists of an analysis of modern technologies and their forthcoming developments. It focuses on the recent progress in devices and production procedures in the field of these miniaturized electromechanical structures. This book presents information about design, production and packaging; as well as solutions in these aspects for targeted functions. This book aims to help experts and students who are engaged in this field.

Advanced MEMS/NEMS Fabrication and Sensors

2021-10-12 Technology & Engineering
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Release : 2021-10-12
Genre : Technology & Engineering
Kind : eBook
Book Rating : 49X/5 ( reviews)

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Book Synopsis Advanced MEMS/NEMS Fabrication and Sensors by : Zhuoqing Yang

Download or read book Advanced MEMS/NEMS Fabrication and Sensors written by Zhuoqing Yang. This book was released on 2021-10-12. Available in PDF, EPUB and Kindle. Book excerpt: This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

Micro and Nano Fabrication

2015-01-02 Technology & Engineering
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Release : 2015-01-02
Genre : Technology & Engineering
Kind : eBook
Book Rating : 953/5 ( reviews)

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Book Synopsis Micro and Nano Fabrication by : Hans H. Gatzen

Download or read book Micro and Nano Fabrication written by Hans H. Gatzen. This book was released on 2015-01-02. Available in PDF, EPUB and Kindle. Book excerpt: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

MEMS and NEMS

2018-10-03 Technology & Engineering
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Release : 2018-10-03
Genre : Technology & Engineering
Kind : eBook
Book Rating : 510/5 ( reviews)

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Book Synopsis MEMS and NEMS by : Sergey Edward Lyshevski

Download or read book MEMS and NEMS written by Sergey Edward Lyshevski. This book was released on 2018-10-03. Available in PDF, EPUB and Kindle. Book excerpt: The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

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