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A Practical Guide to Optical Metrology for Thin Films

2012-09-24 Science
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Release : 2012-09-24
Genre : Science
Kind : eBook
Book Rating : 351/5 ( reviews)

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Book Synopsis A Practical Guide to Optical Metrology for Thin Films by : Michael Quinten

Download or read book A Practical Guide to Optical Metrology for Thin Films written by Michael Quinten. This book was released on 2012-09-24. Available in PDF, EPUB and Kindle. Book excerpt: A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon. Aimed at industrial and academic researchers, engineers, developers and manufacturers involved in all areas of optical layer and thin optical film measurement and metrology, process control, real-time monitoring, and applications.

A Practical Guide to Surface Metrology

2020-01-01 Technology & Engineering
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Release : 2020-01-01
Genre : Technology & Engineering
Kind : eBook
Book Rating : 544/5 ( reviews)

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Book Synopsis A Practical Guide to Surface Metrology by : Michael Quinten

Download or read book A Practical Guide to Surface Metrology written by Michael Quinten. This book was released on 2020-01-01. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context. Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors). The book provides: Overview of the working principles Description of advantages and disadvantages Currently achievable numbers for resolutions, repeatability, and reproducibility Examples of real-world applications A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.

Handbook of Thin Film Process Technology

2018-01-18 Science
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Release : 2018-01-18
Genre : Science
Kind : eBook
Book Rating : 241/5 ( reviews)

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Book Synopsis Handbook of Thin Film Process Technology by : D Glocker

Download or read book Handbook of Thin Film Process Technology written by D Glocker. This book was released on 2018-01-18. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.

Practical Production of Optical Thin Films

2016-11-15
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Release : 2016-11-15
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Kind : eBook
Book Rating : 130/5 ( reviews)

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Book Synopsis Practical Production of Optical Thin Films by : Ronald R. Willey

Download or read book Practical Production of Optical Thin Films written by Ronald R. Willey. This book was released on 2016-11-15. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with the typical equipment, materials, processes, monitoring, and control used in the practical fabrication/production of optical thin films. It focuses on the practical elements needed to actually produce optical coatings.

Practical Design of Optical Thin Films, Fifth Edition

2018-01-18
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Release : 2018-01-18
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Kind : eBook
Book Rating : 359/5 ( reviews)

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Book Synopsis Practical Design of Optical Thin Films, Fifth Edition by : Ronald R Willey

Download or read book Practical Design of Optical Thin Films, Fifth Edition written by Ronald R Willey. This book was released on 2018-01-18. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with the basic fundamentals, understanding, and design of optical thin films, or interference coatings for practical production. It focuses on one of the main subjects that is critical to meeting the practical challenges of producing optical coatings. This is the design of coatings, an understanding of which allows the practitioner to know the possibilities and limitations involved in reducing, enhancing, or otherwise controlling the reflection, transmission, and absorption of light (visible or otherwise). This Fifth Edition now includes measurement of index, thickness, and color; the determination of tooling factors; and the programming of Macros, Workbooks, and FilmStar Basic.

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